Heterogeneously integrated light emitting diodes and photodetectors in the metal-insulator-metal waveguide platform
We demonstrate heterogeneous integration of active semiconductor materials into the conventional passive metal-insulator-metal (MIM) waveguides to provide compact on-chip light generation and detection capabilities for chip-scale active nanophotonic platforms. Depending on its bias conditions, a met...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2023-05-01
|
| Series: | Nanophotonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/nanoph-2022-0784 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Summary: | We demonstrate heterogeneous integration of active semiconductor materials into the conventional passive metal-insulator-metal (MIM) waveguides to provide compact on-chip light generation and detection capabilities for chip-scale active nanophotonic platforms. Depending on its bias conditions, a metal-semiconductor-metal section can function as either a light emitting diode or a photodetector directly connected to the MIM waveguides. We experimentally verify the independent and combined operations of electrically-driven on-chip light sources and photodetectors. |
|---|---|
| ISSN: | 2192-8614 |