A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone
Measurement of a volatile solution is essential for laboratory safety and hospital clinic safety. In this paper, we present an ethanol-sensing and acetone-sensing device using an AlN piezoelectric material-based film bulk acoustic resonator (FBAR). In order to realize volatile solution sensing, the...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022-01-01
|
| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2022/8620943 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|