Automatic Characterization of High-Performance MEMS-Based IR Sensors

The next generation of infrared (IR) sensors may enable unprecedented applications in fields like spectroscopy, health monitoring, and communication systems. For instance, metasurface-enhanced micro-electromechanical system (MEMS)-based IR sensors have demonstrated excellent performance in terms of...

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Bibliographic Details
Main Authors: Matthew Benson, Ryan W. Parker, Melisa Ekin Gulseren, Juan Sebastian Gomez-Diaz
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/10798116/
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