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    Aerosol Deposited Polycrystalline PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> Thick Films with a Large Transverse Piezoelectric Coefficient

    Aerosol Deposited Polycrystalline PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> Thick Films with a Large Transverse Piezoelectric Coefficient by Long Teng, Juan Yang, Yongguang Xiao, Hongbo Cheng, Shibo Gong, Gao Luo, Jinlin Yang, Wenjia Zhang, Zhenwei Shen, Jun Ouyang

    Published 2025-02-01
    “…The PZT53/47 films also exhibited a large small-field dielectric constant of ~984, a high tunability of 72%, and a low leakage current of ~3.1 × 10<sup>−5</sup> A/cm<sup>2</sup> @ 40 V. Moreover, the transverse piezoelectric coefficient (<i>e</i><sub>31.f</sub>) of these AD-processed films was as high as −4.6 C/m<sup>2</sup>, comparable to those of sputter-deposited PZT53/47 films. …”
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