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    Kinetics, thermodynamics, and catalysis of the cation incorporation into GeO2, SnO2, and (SnxGe1−x)O2 during suboxide molecular beam epitaxy by Wenshan Chen, Kingsley Egbo, Joe Kler, Andreas Falkenstein, Jonas Lähnemann, Oliver Bierwagen

    Published 2025-01-01
    “…Our experimental study provides guidance for controlling the growth rate and alloy composition of (SnxGe1−x)O2 in S-MBE, highlighting the impact of the substrate temperature and active oxygen flux besides that of the mere SnO:GeO flux stoichiometry. The results are likely transferable to further physical and chemical vapor deposition methods, such as conventional and hybrid MBE, pulsed laser deposition, mist-, or metalorganic chemical vapor deposition.…”
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