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    Model of simulation of the process of formation of functional surfaces of micro-opto-electro-mechanical systems’ components by І.Ш. Невлюдов, О.О. Чала, О.І. Филипенко, І.В. Боцман

    Published 2020-06-01
    Subjects: “…micro-opto-electro-mechanical systems’, functional component, shaping, physical and technological parameters, mathematical model, modeling, abrasive processing, grinding, polishing.…”
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    Article
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