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    Analysis of the Process Influences on the Preparation of SiC Coatings by Chemical Vapor Deposition by CHEN Liangcai, YIN Xiang, WANG Qingchun, LONG Lianchun

    Published 2024-11-01
    Subjects: “…chemical vapor deposition;silicon carbide;antioxidant;numerical simulation;process control…”
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    Article
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