Showing 1 - 2 results of 2 for search '"ultra-high vacuum (UHV) radio frequency (RF) magnetron sputtering"', query time: 0.04s Refine Results
  1. 1
    Improvement of MoS<sub>2</sub> Film Quality by Low Flux of Sputtered Particles Using a Molybdenum Grid

    Improvement of MoS<sub>2</sub> Film Quality by Low Flux of Sputtered Particles Using a Molybdenum Grid by Shinya Imai, Ryo Ono, Iriya Muneta, Kuniyuki Kakushima, Tetsuya Tatsumi, Shigetaka Tomiya, Kazuo Tsutsui, Hitoshi Wakabayashi

    Published 2025-01-01
    Subjects: “…ultra-high vacuum (UHV) radio frequency (RF) magnetron sputtering…”
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  2. 2
    Conductivity Enhancement of PVD-WS<sub>2</sub> Films Using Cl<sub>2</sub>-Plasma Treatment Followed by Sulfur-Vapor Annealing

    Conductivity Enhancement of PVD-WS<sub>2</sub> Films Using Cl<sub>2</sub>-Plasma Treatment Followed by Sulfur-Vapor Annealing by Keita Kurohara, Shinya Imai, Takuya Hamada, Tetsuya Tatsumi, Shigetaka Tomiya, Kuniyuki Kakushima, Kazuo Tsutsui, Hitoshi Wakabayashi

    Published 2024-01-01
    Subjects: “…ultra-high-vacuum (UHV) radio-frequency (RF) magnetron sputtering…”
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