Spectral Ellipsometry as a Method of Investigation of Influence of Rapid Thermal Processing of Silicon Wafers on their Optical Characteristics by V. A. Solodukha, U. A. Pilipenko, A. A. Omelchenko, D. V. Shestovski

Subjects: “…rapid thermal processing…”
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Simulation of silicon wafers heating during rapid thermal processing using “UBTO 1801” unit by J. A. Solovjov, V. A. Pilipenko, V. P. Yakovlev

Subjects: “…rapid thermal processing…”
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Energy-Dispersive X-Ray Microanalysis – as a Method for Study the Aluminium-Polysilicon Interface after Exposure with Long-Term and Rapid Thermal Annealing by U. A. Pilipenko, N. S. Kovalchuk, D. V. Shestovski, D. V. Zhyhulin

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Thermal Load Influence during the Formation of Al-Al Contacts on the Electrical Parameters of the Integrated Circuits with Aluminum-Polysilicon Contacts by V. A. Pilipenko, V. A. Solodukha, N. S. Kovalchuk, J. A. Solovjov, D. V. Shestovski, D. V. Zhyhulin

Subjects: “…rapid thermal processing method…”
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Temperature Dependence of 3С-SiC Growth During Rapid Vacuum Thermal Silicon Treatment by M. V. Labanok, P. I. Gaiduk

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Research of Electrophysical Properties of Thin Gate Dielectrics Obtained by Rapid Thermal Processing Method by N. S. Kovalchuk, A. A. Omelchenko, V. A. Pilipenko, V. A. Solodukha, S. V. Demidovich, V. V. Kolos, V. A. Filipenia, D. V. Shestovski

Subjects: “…rapid thermal processing method…”
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Observation of novel carbon nanocorals during the synthesis of graphene and investigations on their composition, morphological and structural properties by Debashree Das, Girish M. Gouda, K.B. Jinesh

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