Tunable MEMS-based meta-absorbers for nondispersive infrared gas sensing applications by Kunye Li, Yuhao Liang, Yuxin Liu, Yu-Sheng Lin

“…Therefore, the multiplexed NDIR gas sensor requires multiple pairs of narrowband filters, which is not conducive to miniaturization and integration. Although plasmonic metamaterials or multilayer thin-film structures are widely applied in spectral absorption filters, realizing high-performance, large-area, multiband, and compact filters is rather challenging. …”
Get full text