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    A method of monitoring the functional surfaces of the micro-opto-electro-mechanical systems’ components by І.Ш. Невлюдов, О.І. Филипенко, О.О. Чала, І.В. Боцман

    Published 2020-08-01
    Subjects: “…method, non-destructive control, optical component, batterword filter, moems, manufacturing defect.…”
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