The Effect of Metal Shielding Layer on Electrostatic Attraction Issue in Glass–Silicon Anodic Bonding by Wenqi Yang, Yong Ruan, Zhiqiang Song

Subjects: “…microelectromechanical systems (MEMS)…”
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Impact of Radial Electrode Coverage on the Performance of Liquid-Deployed PMUTs: A Dynamic and Kinematic Study by Stephen Sammut, Edward Gatt, Ruben Paul Borg

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Effects of Base Materials (α-Alumina and/or γ-Alumina) on Volatile Organic Compounds (VOCs)-Sensing Properties of Adsorption/Combustion-Type Microsensors by Takeo Hyodo, Yuma Matsuura, Genki Inao, Takahiko Sasahara, Yasuhiro Shimizu, Taro Ueda

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Calculation strength of torsion bar suspension of micromirrors (MEOMS) by D. I. Chernyavsky, D. D. Chernyavsky

Subjects: “…microelectromechanical systems (mems)…”
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Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS) by D. I. Chernyavsky, D. D. Chernyavsky

Subjects: “…microelectromechanical systems (mems)…”
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Performance Enhancement of NavIC With Low-Cost MEMS-IMU, Barometer, and Magnetometer by Saraswathi Sirikonda, Laxminarayana Parayitam, Hari B. Hablani

Subjects: “…micro-electromechanical system (MEMS)…”
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