Conductivity Enhancement of PVD-WS₂ Films Using Cl₂-Plasma Treatment Followed by Sulfur-Vapor Annealing by Keita Kurohara, Shinya Imai, Takuya Hamada, Tetsuya Tatsumi, Shigetaka Tomiya, Kuniyuki Kakushima, Kazuo Tsutsui, Hitoshi Wakabayashi

Subjects: “…ultra-high-vacuum (UHV) radio-frequency (RF) magnetron sputtering…”
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