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    Experimental study on the damage characteristics of sol-gel antireflection coatings on large-aperture optical components by in-situ plasma cleaning

    Experimental study on the damage characteristics of sol-gel antireflection coatings on large-aperture optical components by in-situ plasma cleaning by Rongqi Shen, Yuhai Li, Zixu Wang, Laixi Sun, Xiaodong Yuan, Xiang Dong, Xia Xiang, Bo Li, Xujie Liu, Xueshi Xu, Tingting Wang, Qingshun Bai

    Published 2025-01-01
    Subjects: “…low-pressure plasma…”
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