Advancements in MEMS Micromirror and Microshutter Arrays for Light Transmission Through a Substrate by Shilby Baby, Mustaqim Siddi Que Iskhandar, Md Kamrul Hasan, Steffen Liebermann, Jiahao Chen, Hasnain Qasim, Shujie Liu, Eslam Farrag, Dennis Löber, Naureen Ahmed, Guilin Xu, Hartmut Hillmer

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