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    Effects of potassium sodium niobate (KNN) thickness on biaxial non-resonant microelectromechanical systems (MEMS) mirror performance by L. Mollard, C. Dieppedale, A. Hamelin, R. Liechti, G. Le Rhun

    Published 2025-02-01
    “…These results indicate that the MEMS mirrors fabricated with the KNN lead-free piezoelectric material offer state-of-the-art performances and open potential applications in a wide range of fields from light detection and ranging (lidar) systems to biomedical applications, thanks to the full biocompatibility of the KNN material.…”
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