Digital Etching of Molybdenum Interconnects Using Plasma Oxidation by Ivan Erofeev, Antony Winata Hartanto, Muhaimin Mareum Khan, Kerong Deng, Krishna Kumar, Zainul Aabdin, Weng Weei Tjiu, Mingsheng Zhang, Antoine Pacco, Harold Philipsen, Angshuman Ray Chowdhuri, Han Vinh Huynh, Frank Holsteyns, Utkur Mirsaidov

Subjects: “…atomic layer etching (ALE)…”
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Layer Number Controllable Molybdenum Disulfide Film Growth and Its Applications in Vertical and Planar Photodetectors by Yu‐Han Huang, Zhi‐Wei Chen, Chao‐Hsin Wu, Po‐Tsung Lee, Shih‐Yen Lin

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