Integrated structure for a resonant micro-gyroscope and accelerometer by V. Zega, C. Comi, A. Corigliano, C. Valzasina

“…The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw) on the variation of frequency of several elements set in resonance. …”
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Theoretical and experimental investigations of the CMOS compatible Pirani gauges with a temperature compensation model by Shizhen Xu, Gai Yang, Junfu Chen, Rui Jiao, Ruoqin Wang, Hongyu Yu, Huikai Xie, Xiaoyi Wang

“…Abstract In this article, a CMOS-compatible Pirani vacuum gauge was proposed featuring enhanced sensitivity, lower detection limit, and high-temperature stability, achieved through the implementation of a surface micromachining method coupled with a temperature compensation strategy. …”
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