Search alternatives:
"Silicon microstructures" » "Silicon microstructure" (Expand Search), "Silicon microstructural" (Expand Search)
"Silicon microstructures" » "Silicon microstructure" (Expand Search), "Silicon microstructural" (Expand Search)
-
1
Field enhancement effect in reactive ion etching – a novel mechanism for plasma processing and plasma diagnostics
Published 2025-06-01Subjects: Get full text
Article