Showing 21 - 26 results of 26 for search '"MEMS"', query time: 0.03s Refine Results
  1. 21
  2. 22
  3. 23

    Calculation strength of torsion bar suspension of micromirrors (MEOMS) by D. I. Chernyavsky, D. D. Chernyavsky

    Published 2021-06-01
    Subjects: “…microelectromechanical systems (mems)…”
    Get full text
    Article
  4. 24
  5. 25
  6. 26