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    The Study of Microwave and Electric Hybrid Sintering Process of AZO Target by Ling-yun Han, Yong-chun Shu, Yang Liu, Lu Gao, Qing-tong Wang, Xiao-na Zhang

    Published 2016-01-01
    “…Through studying the microwave and electric hybrid sintering of the green compact, a relative density of up to 98.1% could be obtained by starting microwave heating at 1200°C and increasing the power 20 min later to 4 kW for an AZO ceramic target measuring 120 × 240 × 12 mm. …”
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