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    Investigation the CMP process of 6 H-SiC in H2O2 solution with ReaxFF molecular dynamics simulation

    Investigation the CMP process of 6 H-SiC in H2O2 solution with ReaxFF molecular dynamics simulation by Yanzhang Gu, Kaiping Feng, Lanxing Xu, Liang Zhao, Tianchen Zhao, Binghai Lyu

    Published 2025-01-01
    Subjects: “…6H-SiC wafer…”
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