Determination of contact resistivity of ohmic contacts to semiconductor plates by the method Cox-Strack

Modified variant of the method Cox-Strack, which allows to reduce an amount of frontal contacts on the test sample before 2 and simultaneously exclude an operation of the extrapolation of schedules at the determination of the specific contact resistance ρК, is considered. There is shown that con...

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Main Author: R. B. Burlakov
Format: Article
Language:English
Published: Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education 2018-09-01
Series:Омский научный вестник
Subjects:
Online Access:https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/4%20(160)/119-123%20%D0%91%D1%83%D1%80%D0%BB%D0%B0%D0%BA%D0%BE%D0%B2%20%D0%A0.%20%D0%91..pdf
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author R. B. Burlakov
author_facet R. B. Burlakov
author_sort R. B. Burlakov
collection DOAJ
description Modified variant of the method Cox-Strack, which allows to reduce an amount of frontal contacts on the test sample before 2 and simultaneously exclude an operation of the extrapolation of schedules at the determination of the specific contact resistance ρК, is considered. There is shown that contribution of the contact resistance RK in the impedance RT of the test structure takes greater values, when diameter of the frontal contact lies in the interval 40–1040 micrometer, that promote more efficient process of supervision resistivity of ohmic contacts to semiconductor plates.
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institution Kabale University
issn 1813-8225
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language English
publishDate 2018-09-01
publisher Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
record_format Article
series Омский научный вестник
spelling doaj-art-ff6999799cc444c78c5ae519e76cef482025-02-02T02:44:09ZengOmsk State Technical University, Federal State Autonoumos Educational Institution of Higher EducationОмский научный вестник1813-82252541-75412018-09-014 (160)11912310.25206/1813-8225-2018-160-119-123Determination of contact resistivity of ohmic contacts to semiconductor plates by the method Cox-StrackR. B. Burlakov0Dostoevsky Omsk State UniversityModified variant of the method Cox-Strack, which allows to reduce an amount of frontal contacts on the test sample before 2 and simultaneously exclude an operation of the extrapolation of schedules at the determination of the specific contact resistance ρК, is considered. There is shown that contribution of the contact resistance RK in the impedance RT of the test structure takes greater values, when diameter of the frontal contact lies in the interval 40–1040 micrometer, that promote more efficient process of supervision resistivity of ohmic contacts to semiconductor plates.https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/4%20(160)/119-123%20%D0%91%D1%83%D1%80%D0%BB%D0%B0%D0%BA%D0%BE%D0%B2%20%D0%A0.%20%D0%91..pdfohmic contactssemiconductor platemeasurement of contact resistancemethod cox-strackoptimization of measurements
spellingShingle R. B. Burlakov
Determination of contact resistivity of ohmic contacts to semiconductor plates by the method Cox-Strack
Омский научный вестник
ohmic contacts
semiconductor plate
measurement of contact resistance
method cox-strack
optimization of measurements
title Determination of contact resistivity of ohmic contacts to semiconductor plates by the method Cox-Strack
title_full Determination of contact resistivity of ohmic contacts to semiconductor plates by the method Cox-Strack
title_fullStr Determination of contact resistivity of ohmic contacts to semiconductor plates by the method Cox-Strack
title_full_unstemmed Determination of contact resistivity of ohmic contacts to semiconductor plates by the method Cox-Strack
title_short Determination of contact resistivity of ohmic contacts to semiconductor plates by the method Cox-Strack
title_sort determination of contact resistivity of ohmic contacts to semiconductor plates by the method cox strack
topic ohmic contacts
semiconductor plate
measurement of contact resistance
method cox-strack
optimization of measurements
url https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/4%20(160)/119-123%20%D0%91%D1%83%D1%80%D0%BB%D0%B0%D0%BA%D0%BE%D0%B2%20%D0%A0.%20%D0%91..pdf
work_keys_str_mv AT rbburlakov determinationofcontactresistivityofohmiccontactstosemiconductorplatesbythemethodcoxstrack