Characterization of Series Resistances and Mobility Attenuation Phenomena in Short Channel MOS Transistors
As the scaling proceeds, the transverse electric field increase, and a mobility attenuation phenomenon becomes of primordial interest. Indeed, the high transverse electric field is generally ascribed [1] to surface roughness scattering in the channel and consequently reduce effective mobility of car...
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Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Wiley
2001-01-01
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Series: | Active and Passive Electronic Components |
Subjects: | |
Online Access: | http://dx.doi.org/10.1155/2001/75780 |
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Summary: | As the scaling proceeds, the transverse electric field increase, and a mobility attenuation
phenomenon becomes of primordial interest. Indeed, the high transverse electric field is
generally ascribed [1] to surface roughness scattering in the channel and consequently
reduce effective mobility of carriers. In short channel MOSFET, the Source-Drain
resistance Rsd influence strongly the effective mobility. |
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ISSN: | 0882-7516 1563-5031 |