Nanoindentation of nickel film by magnetron sputtering ion plating on sapphire: Molecular dynamics simulations and experiments
Magnetron sputtering deposition of metals on sapphire (α-Al2O3) has emerged as significant research focus in advanced manufacturing due to its critical role in enhancing sapphire’s performance. This study examines the effects of varying negative biases (60 V, 80 V, 100 V) and annealing treatments on...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-06-01
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| Series: | Results in Physics |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2211379725001275 |
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