Advanced perspective on heavily phosphorus-doped diamond layers via optical emission spectroscopy

Advanced perspective on heavily phosphorus-doped diamond layers via optical emission spectroscopy

Although heavily phosphorus-doped diamond (PDD) holds great potential for advanced device applications, incorporating phosphorus into diamond remains challenging with conventional growth methods. In this study, optical emission spectroscopy (OES) was used to correlate the emission intensity ratio of...

Full description

Saved in:
Bibliographic Details
Main Authors: Kil-dong Sung, Stefan Andrei Irimiciuc, Michal Novotný, Zdeněk Weiss, Pavel Hubík, Jaromír Kopeček, Martin Vondráček, Vincent Mortet
Format: Article
Language:English
Published: AIP Publishing LLC 2025-01-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/5.0238713
Tags: Add Tag
No Tags, Be the first to tag this record!

Similar Items

Similar Items