Fabrication of Large-Grain Thick Polycrystalline Silicon Thin Films via Aluminum-Induced Crystallization for Application in Solar Cells
The fabrication of large-grain 1.25 μm thick polycrystalline silicon (poly-Si) films via two-stage aluminum-induced crystallization (AIC) for application in thin-film solar cells is reported. The induced 250 nm thick poly-Si film in the first stage is used as the seed layer for the crystallization o...
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| Format: | Article |
| Language: | English |
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Wiley
2013-01-01
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| Series: | International Journal of Photoenergy |
| Online Access: | http://dx.doi.org/10.1155/2013/245195 |
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| _version_ | 1832558765159743488 |
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| author | Hsiao-Yeh Chu Min-Hang Weng Chen Lin |
| author_facet | Hsiao-Yeh Chu Min-Hang Weng Chen Lin |
| author_sort | Hsiao-Yeh Chu |
| collection | DOAJ |
| description | The fabrication of large-grain 1.25 μm thick polycrystalline silicon (poly-Si) films via two-stage aluminum-induced crystallization (AIC) for application in thin-film solar cells is reported. The induced 250 nm thick poly-Si film in the first stage is used as the seed layer for the crystallization of a 1 μm thick amorphous silicon (a-Si) film in the second stage. The annealing temperatures in the two stages are both 500°C. The effect of annealing time (15, 30, 60, and 120 minutes) in the second stage on the crystallization of a-Si film is investigated using X-ray diffraction (XRD), scanning electron microscopy, and Raman spectroscopy. XRD and Raman results confirm that the induced poly-Si films are induced by the proposed process. |
| format | Article |
| id | doaj-art-f561ea7cd4344448ac63713e5d7b4438 |
| institution | Kabale University |
| issn | 1110-662X 1687-529X |
| language | English |
| publishDate | 2013-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | International Journal of Photoenergy |
| spelling | doaj-art-f561ea7cd4344448ac63713e5d7b44382025-02-03T01:31:46ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2013-01-01201310.1155/2013/245195245195Fabrication of Large-Grain Thick Polycrystalline Silicon Thin Films via Aluminum-Induced Crystallization for Application in Solar CellsHsiao-Yeh Chu0Min-Hang Weng1Chen Lin2Department of Mechanical Engineering, Kun Shan University, Tainan 71003, TaiwanMetal Industries Research & Development Center, Kaohsiung 81160, TaiwanTaiwan Cement Corporation, Taipei 10448, TaiwanThe fabrication of large-grain 1.25 μm thick polycrystalline silicon (poly-Si) films via two-stage aluminum-induced crystallization (AIC) for application in thin-film solar cells is reported. The induced 250 nm thick poly-Si film in the first stage is used as the seed layer for the crystallization of a 1 μm thick amorphous silicon (a-Si) film in the second stage. The annealing temperatures in the two stages are both 500°C. The effect of annealing time (15, 30, 60, and 120 minutes) in the second stage on the crystallization of a-Si film is investigated using X-ray diffraction (XRD), scanning electron microscopy, and Raman spectroscopy. XRD and Raman results confirm that the induced poly-Si films are induced by the proposed process.http://dx.doi.org/10.1155/2013/245195 |
| spellingShingle | Hsiao-Yeh Chu Min-Hang Weng Chen Lin Fabrication of Large-Grain Thick Polycrystalline Silicon Thin Films via Aluminum-Induced Crystallization for Application in Solar Cells International Journal of Photoenergy |
| title | Fabrication of Large-Grain Thick Polycrystalline Silicon Thin Films via Aluminum-Induced Crystallization for Application in Solar Cells |
| title_full | Fabrication of Large-Grain Thick Polycrystalline Silicon Thin Films via Aluminum-Induced Crystallization for Application in Solar Cells |
| title_fullStr | Fabrication of Large-Grain Thick Polycrystalline Silicon Thin Films via Aluminum-Induced Crystallization for Application in Solar Cells |
| title_full_unstemmed | Fabrication of Large-Grain Thick Polycrystalline Silicon Thin Films via Aluminum-Induced Crystallization for Application in Solar Cells |
| title_short | Fabrication of Large-Grain Thick Polycrystalline Silicon Thin Films via Aluminum-Induced Crystallization for Application in Solar Cells |
| title_sort | fabrication of large grain thick polycrystalline silicon thin films via aluminum induced crystallization for application in solar cells |
| url | http://dx.doi.org/10.1155/2013/245195 |
| work_keys_str_mv | AT hsiaoyehchu fabricationoflargegrainthickpolycrystallinesiliconthinfilmsviaaluminuminducedcrystallizationforapplicationinsolarcells AT minhangweng fabricationoflargegrainthickpolycrystallinesiliconthinfilmsviaaluminuminducedcrystallizationforapplicationinsolarcells AT chenlin fabricationoflargegrainthickpolycrystallinesiliconthinfilmsviaaluminuminducedcrystallizationforapplicationinsolarcells |