Automatic Mode-Matching Method for MEMS Gyroscope Based on Fast Mode Reversal

Automatic Mode-Matching Method for MEMS Gyroscope Based on Fast Mode Reversal

Processing errors can result in an asymmetric stiffness distribution within a microelectromechanical system (MEMS) disk resonator gyroscope (DRG) and thereby cause a mode mismatch and reduce the mechanical sensitivity and closed-loop scale factor stability. This paper proposes an automatic mode-matc...

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Bibliographic Details
Main Authors: Feng Bu, Bo Fan, Rui Feng, Ming Zhou, Yiwang Wang
Format: Article
Language:English
Published: MDPI AG 2025-06-01
Series:Micromachines
Subjects:
MEMS disk resonator gyroscope
mode-matching
fast mode reversal
force to rebalance
Online Access:https://www.mdpi.com/2072-666X/16/6/704
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