Manufacturing high-performance flexible sensors via advanced patterning techniques
Sensors play an important role in information perception during the age of intelligence, particularly in areas such as environmental monitoring and human perception. To meet the huge demands for information acquisition in the whole society, the development of elaborated sensor structures using patte...
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| Format: | Article |
| Language: | English |
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IOP Publishing
2025-01-01
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| Series: | International Journal of Extreme Manufacturing |
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| Online Access: | https://doi.org/10.1088/2631-7990/ada857 |
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| author | Xiaokun Qin Bowen Zhong Hao Xu Joshua A Jackman Kaichen Xu Nam-Joon Cho Zheng Lou Lili Wang |
| author_facet | Xiaokun Qin Bowen Zhong Hao Xu Joshua A Jackman Kaichen Xu Nam-Joon Cho Zheng Lou Lili Wang |
| author_sort | Xiaokun Qin |
| collection | DOAJ |
| description | Sensors play an important role in information perception during the age of intelligence, particularly in areas such as environmental monitoring and human perception. To meet the huge demands for information acquisition in the whole society, the development of elaborated sensor structures using patterned manufacturing technology is important to improve the performance of sensors. Creating patterned structures can enhance the interaction between the sensitive material and target matter, increase the contact area between the sensor and the target matter, amplify the effect of target matter on the sensor structure, and enhance the density of information sensing by building arrays. This review presents a comprehensive overview of patterned micro-nanostructure manufacturing techniques for performance enhancement of flexible sensors, including printing, exposure lithography, mould method, soft lithography, nanoimprinting lithography, and laser direct writing technology. Meanwhile, it introduces the evaluation methods of flexible sensor performance and discusses how patterned structures influence this performance. Finally, some practical application examples of patterned manufacturing techniques are introduced according to different types of flexible sensors. This review also summarises and provides an outlook on the role of these techniques in enhancing sensor performance offering valuable insights for future developments in the patterned manufacturing of flexible sensors. |
| format | Article |
| id | doaj-art-eff114055ffe48a6a0d846e70b6642e5 |
| institution | Kabale University |
| issn | 2631-7990 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | IOP Publishing |
| record_format | Article |
| series | International Journal of Extreme Manufacturing |
| spelling | doaj-art-eff114055ffe48a6a0d846e70b6642e52025-01-27T10:16:33ZengIOP PublishingInternational Journal of Extreme Manufacturing2631-79902025-01-017303200310.1088/2631-7990/ada857Manufacturing high-performance flexible sensors via advanced patterning techniquesXiaokun Qin0Bowen Zhong1Hao Xu2Joshua A Jackman3Kaichen Xu4https://orcid.org/0000-0003-4957-3144Nam-Joon Cho5Zheng Lou6Lili Wang7https://orcid.org/0000-0002-0422-4277State Key Laboratory for Semiconductor Physics and Chip Technologies, Institute of Semiconductors, Chinese Academy of Sciences , Beijing 100083, People’s Republic of China; Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences , Beijing 100049, People’s Republic of ChinaState Key Laboratory for Semiconductor Physics and Chip Technologies, Institute of Semiconductors, Chinese Academy of Sciences , Beijing 100083, People’s Republic of China; Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences , Beijing 100049, People’s Republic of ChinaState Key Laboratory for Semiconductor Physics and Chip Technologies, Institute of Semiconductors, Chinese Academy of Sciences , Beijing 100083, People’s Republic of China; Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences , Beijing 100049, People’s Republic of ChinaSchool of Chemical Engineering and Translational Nanobioscience Research Center, Sungkyunkwan University , Suwon 16419, Republic of KoreaState Key Laboratory of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University , Hangzhou, People’s Republic of ChinaSchool of Materials Science and Engineering, Nanyang Technological University , Singapore 637553, SingaporeState Key Laboratory for Semiconductor Physics and Chip Technologies, Institute of Semiconductors, Chinese Academy of Sciences , Beijing 100083, People’s Republic of China; Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences , Beijing 100049, People’s Republic of ChinaState Key Laboratory for Semiconductor Physics and Chip Technologies, Institute of Semiconductors, Chinese Academy of Sciences , Beijing 100083, People’s Republic of China; Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences , Beijing 100049, People’s Republic of ChinaSensors play an important role in information perception during the age of intelligence, particularly in areas such as environmental monitoring and human perception. To meet the huge demands for information acquisition in the whole society, the development of elaborated sensor structures using patterned manufacturing technology is important to improve the performance of sensors. Creating patterned structures can enhance the interaction between the sensitive material and target matter, increase the contact area between the sensor and the target matter, amplify the effect of target matter on the sensor structure, and enhance the density of information sensing by building arrays. This review presents a comprehensive overview of patterned micro-nanostructure manufacturing techniques for performance enhancement of flexible sensors, including printing, exposure lithography, mould method, soft lithography, nanoimprinting lithography, and laser direct writing technology. Meanwhile, it introduces the evaluation methods of flexible sensor performance and discusses how patterned structures influence this performance. Finally, some practical application examples of patterned manufacturing techniques are introduced according to different types of flexible sensors. This review also summarises and provides an outlook on the role of these techniques in enhancing sensor performance offering valuable insights for future developments in the patterned manufacturing of flexible sensors.https://doi.org/10.1088/2631-7990/ada857patterned processflexible sensorpatterned structureperformance enhancement |
| spellingShingle | Xiaokun Qin Bowen Zhong Hao Xu Joshua A Jackman Kaichen Xu Nam-Joon Cho Zheng Lou Lili Wang Manufacturing high-performance flexible sensors via advanced patterning techniques International Journal of Extreme Manufacturing patterned process flexible sensor patterned structure performance enhancement |
| title | Manufacturing high-performance flexible sensors via advanced patterning techniques |
| title_full | Manufacturing high-performance flexible sensors via advanced patterning techniques |
| title_fullStr | Manufacturing high-performance flexible sensors via advanced patterning techniques |
| title_full_unstemmed | Manufacturing high-performance flexible sensors via advanced patterning techniques |
| title_short | Manufacturing high-performance flexible sensors via advanced patterning techniques |
| title_sort | manufacturing high performance flexible sensors via advanced patterning techniques |
| topic | patterned process flexible sensor patterned structure performance enhancement |
| url | https://doi.org/10.1088/2631-7990/ada857 |
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