Gao, S., Wang, H., Huang, H., Dong, Z., & Kang, R. Predictive models for the surface roughness and subsurface damage depth of semiconductor materials in precision grinding. IOP Publishing.
Chicago Style (17th ed.) CitationGao, Shang, Haoxiang Wang, Han Huang, Zhigang Dong, and Renke Kang. Predictive Models for the Surface Roughness and Subsurface Damage Depth of Semiconductor Materials in Precision Grinding. IOP Publishing.
MLA (9th ed.) CitationGao, Shang, et al. Predictive Models for the Surface Roughness and Subsurface Damage Depth of Semiconductor Materials in Precision Grinding. IOP Publishing.
Warning: These citations may not always be 100% accurate.