Review of MEMS Test Structures for Mechanical Parameter Extraction

Review of MEMS Test Structures for Mechanical Parameter Extraction

This paper reviews the recent progress in MEMS test structures for mechanical parameter extraction. MEMS test structures reviewed include cantilevers, fixed-fixed beams, bent-beam, guckel rings, pointers, circular diaphragm, and lancet structures. Important mechanical and process parameters are high...

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Bibliographic Details
Main Authors: A. Sharma, M. Kaur, D. Bansal, D. Kumar, K. Rangra
Format: Article
Language:English
Published: Sumy State University 2011-01-01
Series:Журнал нано- та електронної фізики
Subjects:
MEMS Test Structures
Residual Stress
Stress Gradient
Young’s Modulus
Poisson Ratio
Pull- In Voltage
Online Access:http://jnep.sumdu.edu.ua/download/numbers/2011/1,%20Part%202/articles/jnep_2011_V3_N1(Part2)_243-253.pdf
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Summary:This paper reviews the recent progress in MEMS test structures for mechanical parameter extraction. MEMS test structures reviewed include cantilevers, fixed-fixed beams, bent-beam, guckel rings, pointers, circular diaphragm, and lancet structures. Important mechanical and process parameters are highlighted, as they have significant contributions to the performance of MEMS devices. The challenges and statues of the test structures are outlined and discussed.
ISSN:2077-6772

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