Effect of Molybdenum Concentration and Deposition Temperature on the Structure and Tribological Properties of the Diamond-like Carbon Films
Two series of non-hydrogenated diamond-like carbon (DLC) films and molybdenum doped diamond-like carbon (Mo-DLC) films were grown on the silicon substrate using direct current magnetron sputtering. The influence of molybdenum doping (between 6.3 and 11.9 at.% of Mo), as well as the deposited tempera...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/14/11/962 |
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