Using light to image millimeter wave based on stacked meta-MEMS chip
Abstract A stacked metamaterial MEMS (meta-MEMS) chip is proposed, which can perfectly absorb electromagnetic waves, convert them into mechanical energy, drive movement of the optical micro-reflectors array, and detect millimeter waves. It is equivalent to using visible light to image a millimeter w...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-01-01
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| Series: | Light: Science & Applications |
| Online Access: | https://doi.org/10.1038/s41377-024-01733-6 |
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| _version_ | 1832585394428837888 |
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| author | Han Wang Zhigang Wang Cheng Gong Xinyu Li Tiansheng Cui Huiqi Jiang Minghui Deng Bo Yan Weiwei Liu |
| author_facet | Han Wang Zhigang Wang Cheng Gong Xinyu Li Tiansheng Cui Huiqi Jiang Minghui Deng Bo Yan Weiwei Liu |
| author_sort | Han Wang |
| collection | DOAJ |
| description | Abstract A stacked metamaterial MEMS (meta-MEMS) chip is proposed, which can perfectly absorb electromagnetic waves, convert them into mechanical energy, drive movement of the optical micro-reflectors array, and detect millimeter waves. It is equivalent to using visible light to image a millimeter wave. The meta-MEMS adopts the design of upper and lower chip separation and then stacking to achieve the “dielectric-resonant-air-ground” structure, reduce the thickness of the metamaterial and MEMS structures, and improve the performance of millimeter wave imaging. For verification, we designed and prepared a 94 GHz meta-MEMS focal plane array chip, in which the sum of the thickness of the metamaterial and MEMS structures is only 1/2500 wavelength, the pixel size is less than 1/3 wavelength, but the absorption rate is as high as 99.8%. Moreover, a light readout module was constructed to test the millimeter wave imaging performance. The results show that the response speed can reach 144 Hz and the lens-less imaging resolution is 1.5 mm. |
| format | Article |
| id | doaj-art-ed4c343095534861863d3d1eb59825a6 |
| institution | Kabale University |
| issn | 2047-7538 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Light: Science & Applications |
| spelling | doaj-art-ed4c343095534861863d3d1eb59825a62025-01-26T12:53:16ZengNature Publishing GroupLight: Science & Applications2047-75382025-01-0114111010.1038/s41377-024-01733-6Using light to image millimeter wave based on stacked meta-MEMS chipHan Wang0Zhigang Wang1Cheng Gong2Xinyu Li3Tiansheng Cui4Huiqi Jiang5Minghui Deng6Bo Yan7Weiwei Liu8Institute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and TechnologySchool of Electronic Science and Engineering, University of Electronic Science and Technology of ChinaInstitute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and TechnologyInstitute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and TechnologyInstitute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and TechnologyInstitute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and TechnologyInstitute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and TechnologySchool of Electronic Science and Engineering, University of Electronic Science and Technology of ChinaInstitute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and TechnologyAbstract A stacked metamaterial MEMS (meta-MEMS) chip is proposed, which can perfectly absorb electromagnetic waves, convert them into mechanical energy, drive movement of the optical micro-reflectors array, and detect millimeter waves. It is equivalent to using visible light to image a millimeter wave. The meta-MEMS adopts the design of upper and lower chip separation and then stacking to achieve the “dielectric-resonant-air-ground” structure, reduce the thickness of the metamaterial and MEMS structures, and improve the performance of millimeter wave imaging. For verification, we designed and prepared a 94 GHz meta-MEMS focal plane array chip, in which the sum of the thickness of the metamaterial and MEMS structures is only 1/2500 wavelength, the pixel size is less than 1/3 wavelength, but the absorption rate is as high as 99.8%. Moreover, a light readout module was constructed to test the millimeter wave imaging performance. The results show that the response speed can reach 144 Hz and the lens-less imaging resolution is 1.5 mm.https://doi.org/10.1038/s41377-024-01733-6 |
| spellingShingle | Han Wang Zhigang Wang Cheng Gong Xinyu Li Tiansheng Cui Huiqi Jiang Minghui Deng Bo Yan Weiwei Liu Using light to image millimeter wave based on stacked meta-MEMS chip Light: Science & Applications |
| title | Using light to image millimeter wave based on stacked meta-MEMS chip |
| title_full | Using light to image millimeter wave based on stacked meta-MEMS chip |
| title_fullStr | Using light to image millimeter wave based on stacked meta-MEMS chip |
| title_full_unstemmed | Using light to image millimeter wave based on stacked meta-MEMS chip |
| title_short | Using light to image millimeter wave based on stacked meta-MEMS chip |
| title_sort | using light to image millimeter wave based on stacked meta mems chip |
| url | https://doi.org/10.1038/s41377-024-01733-6 |
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