Using light to image millimeter wave based on stacked meta-MEMS chip
Abstract A stacked metamaterial MEMS (meta-MEMS) chip is proposed, which can perfectly absorb electromagnetic waves, convert them into mechanical energy, drive movement of the optical micro-reflectors array, and detect millimeter waves. It is equivalent to using visible light to image a millimeter w...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-01-01
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| Series: | Light: Science & Applications |
| Online Access: | https://doi.org/10.1038/s41377-024-01733-6 |
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| Summary: | Abstract A stacked metamaterial MEMS (meta-MEMS) chip is proposed, which can perfectly absorb electromagnetic waves, convert them into mechanical energy, drive movement of the optical micro-reflectors array, and detect millimeter waves. It is equivalent to using visible light to image a millimeter wave. The meta-MEMS adopts the design of upper and lower chip separation and then stacking to achieve the “dielectric-resonant-air-ground” structure, reduce the thickness of the metamaterial and MEMS structures, and improve the performance of millimeter wave imaging. For verification, we designed and prepared a 94 GHz meta-MEMS focal plane array chip, in which the sum of the thickness of the metamaterial and MEMS structures is only 1/2500 wavelength, the pixel size is less than 1/3 wavelength, but the absorption rate is as high as 99.8%. Moreover, a light readout module was constructed to test the millimeter wave imaging performance. The results show that the response speed can reach 144 Hz and the lens-less imaging resolution is 1.5 mm. |
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| ISSN: | 2047-7538 |