Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope
Energy dissipation contribution of micro-machined Coriolis vibratory gyroscope (MCVG) is modeled, numerically simulated, and experimentally verified in this paper. First, the amount of independent damping dissipation consisting of thermoelastic loss, anchor loss, surface loss, Akhiezer loss, and air...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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Wiley
2018-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2018/6901268 |
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| _version_ | 1832567905552695296 |
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| author | J. Zhou Q. Shen J. B. Xie P. P. Cao W. Z. Yuan |
| author_facet | J. Zhou Q. Shen J. B. Xie P. P. Cao W. Z. Yuan |
| author_sort | J. Zhou |
| collection | DOAJ |
| description | Energy dissipation contribution of micro-machined Coriolis vibratory gyroscope (MCVG) is modeled, numerically simulated, and experimentally verified in this paper. First, the amount of independent damping dissipation consisting of thermoelastic loss, anchor loss, surface loss, Akhiezer loss, and air damping loss during vibration is obtained by simulation model, PML-based method, and numerical calculation, respectively. Then, temperature and pressure dependence characteristic of the corresponding quality factor (Q) for the MCVG are obtained. Meanwhile, dominant sources of damping dissipation are determined, which paves the way to improve Q. Finally, the temperature-dependent and pressure-dependent characteristics of the total Q are measured with errors of less than 10% and 18% compared with the simulated total Q, respectively, in which accuracy is acceptable for predicting the damping dissipation behavior of MCVG in design stage before high-cost fabrication. |
| format | Article |
| id | doaj-art-eb34350dee8c43afbb884eedae7135a5 |
| institution | Kabale University |
| issn | 1070-9622 1875-9203 |
| language | English |
| publishDate | 2018-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Shock and Vibration |
| spelling | doaj-art-eb34350dee8c43afbb884eedae7135a52025-02-03T01:00:23ZengWileyShock and Vibration1070-96221875-92032018-01-01201810.1155/2018/69012686901268Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined GyroscopeJ. Zhou0Q. Shen1J. B. Xie2P. P. Cao3W. Z. Yuan4Research & Development Institute of Northwestern Polytechnical University in Shenzhen, ChinaResearch & Development Institute of Northwestern Polytechnical University in Shenzhen, ChinaResearch & Development Institute of Northwestern Polytechnical University in Shenzhen, ChinaShanghai Institute of Radio Equipment, Shanghai 200090, ChinaThe MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi’an 710072, ChinaEnergy dissipation contribution of micro-machined Coriolis vibratory gyroscope (MCVG) is modeled, numerically simulated, and experimentally verified in this paper. First, the amount of independent damping dissipation consisting of thermoelastic loss, anchor loss, surface loss, Akhiezer loss, and air damping loss during vibration is obtained by simulation model, PML-based method, and numerical calculation, respectively. Then, temperature and pressure dependence characteristic of the corresponding quality factor (Q) for the MCVG are obtained. Meanwhile, dominant sources of damping dissipation are determined, which paves the way to improve Q. Finally, the temperature-dependent and pressure-dependent characteristics of the total Q are measured with errors of less than 10% and 18% compared with the simulated total Q, respectively, in which accuracy is acceptable for predicting the damping dissipation behavior of MCVG in design stage before high-cost fabrication.http://dx.doi.org/10.1155/2018/6901268 |
| spellingShingle | J. Zhou Q. Shen J. B. Xie P. P. Cao W. Z. Yuan Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope Shock and Vibration |
| title | Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope |
| title_full | Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope |
| title_fullStr | Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope |
| title_full_unstemmed | Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope |
| title_short | Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope |
| title_sort | energy dissipation contribution modeling of vibratory behavior for silicon micromachined gyroscope |
| url | http://dx.doi.org/10.1155/2018/6901268 |
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