Thin Metal Film Sensors

During the last decade some progress have been made in the field of sensors using thin film techniques. In particular thin metal film strain gauges and thin film temperature sensors based on the temperature dependent resistivity of metal are now commonly used. But changes in other transport paramete...

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Main Author: C. R. Tellier
Format: Article
Language:English
Published: Wiley 1985-01-01
Series:Active and Passive Electronic Components
Online Access:http://dx.doi.org/10.1155/1985/17659
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author C. R. Tellier
author_facet C. R. Tellier
author_sort C. R. Tellier
collection DOAJ
description During the last decade some progress have been made in the field of sensors using thin film techniques. In particular thin metal film strain gauges and thin film temperature sensors based on the temperature dependent resistivity of metal are now commonly used. But changes in other transport parameters with various measurands are also useful for the design of metal film sensors. Difficulty arises in thin film techniques when structural defects are frozen in films.
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institution Kabale University
issn 0882-7516
1563-5031
language English
publishDate 1985-01-01
publisher Wiley
record_format Article
series Active and Passive Electronic Components
spelling doaj-art-eb179a4d51ba477b965c0dcffad9d35e2025-02-03T01:09:07ZengWileyActive and Passive Electronic Components0882-75161563-50311985-01-0112193210.1155/1985/17659Thin Metal Film SensorsC. R. Tellier0Laboratoire de Chronométrie, Electronique et Piézoélectricité, Ecole Nationale Supérieure de Mécanique et des Microtechniques, La Bouloie, BESANCON CEDEX 25030, FranceDuring the last decade some progress have been made in the field of sensors using thin film techniques. In particular thin metal film strain gauges and thin film temperature sensors based on the temperature dependent resistivity of metal are now commonly used. But changes in other transport parameters with various measurands are also useful for the design of metal film sensors. Difficulty arises in thin film techniques when structural defects are frozen in films.http://dx.doi.org/10.1155/1985/17659
spellingShingle C. R. Tellier
Thin Metal Film Sensors
Active and Passive Electronic Components
title Thin Metal Film Sensors
title_full Thin Metal Film Sensors
title_fullStr Thin Metal Film Sensors
title_full_unstemmed Thin Metal Film Sensors
title_short Thin Metal Film Sensors
title_sort thin metal film sensors
url http://dx.doi.org/10.1155/1985/17659
work_keys_str_mv AT crtellier thinmetalfilmsensors