Thin Metal Film Sensors
During the last decade some progress have been made in the field of sensors using thin film techniques. In particular thin metal film strain gauges and thin film temperature sensors based on the temperature dependent resistivity of metal are now commonly used. But changes in other transport paramete...
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
1985-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/1985/17659 |
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| _version_ | 1832565207680942080 |
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| author | C. R. Tellier |
| author_facet | C. R. Tellier |
| author_sort | C. R. Tellier |
| collection | DOAJ |
| description | During the last decade some progress have been made in the field of sensors using thin film techniques.
In particular thin metal film strain gauges and thin film temperature sensors based on the temperature
dependent resistivity of metal are now commonly used. But changes in other transport parameters with
various measurands are also useful for the design of metal film sensors. Difficulty arises in thin film
techniques when structural defects are frozen in films. |
| format | Article |
| id | doaj-art-eb179a4d51ba477b965c0dcffad9d35e |
| institution | Kabale University |
| issn | 0882-7516 1563-5031 |
| language | English |
| publishDate | 1985-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Active and Passive Electronic Components |
| spelling | doaj-art-eb179a4d51ba477b965c0dcffad9d35e2025-02-03T01:09:07ZengWileyActive and Passive Electronic Components0882-75161563-50311985-01-0112193210.1155/1985/17659Thin Metal Film SensorsC. R. Tellier0Laboratoire de Chronométrie, Electronique et Piézoélectricité, Ecole Nationale Supérieure de Mécanique et des Microtechniques, La Bouloie, BESANCON CEDEX 25030, FranceDuring the last decade some progress have been made in the field of sensors using thin film techniques. In particular thin metal film strain gauges and thin film temperature sensors based on the temperature dependent resistivity of metal are now commonly used. But changes in other transport parameters with various measurands are also useful for the design of metal film sensors. Difficulty arises in thin film techniques when structural defects are frozen in films.http://dx.doi.org/10.1155/1985/17659 |
| spellingShingle | C. R. Tellier Thin Metal Film Sensors Active and Passive Electronic Components |
| title | Thin Metal Film Sensors |
| title_full | Thin Metal Film Sensors |
| title_fullStr | Thin Metal Film Sensors |
| title_full_unstemmed | Thin Metal Film Sensors |
| title_short | Thin Metal Film Sensors |
| title_sort | thin metal film sensors |
| url | http://dx.doi.org/10.1155/1985/17659 |
| work_keys_str_mv | AT crtellier thinmetalfilmsensors |