Thin Metal Film Sensors
During the last decade some progress have been made in the field of sensors using thin film techniques. In particular thin metal film strain gauges and thin film temperature sensors based on the temperature dependent resistivity of metal are now commonly used. But changes in other transport paramete...
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
1985-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/1985/17659 |
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| Summary: | During the last decade some progress have been made in the field of sensors using thin film techniques.
In particular thin metal film strain gauges and thin film temperature sensors based on the temperature
dependent resistivity of metal are now commonly used. But changes in other transport parameters with
various measurands are also useful for the design of metal film sensors. Difficulty arises in thin film
techniques when structural defects are frozen in films. |
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| ISSN: | 0882-7516 1563-5031 |