High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM

High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM

We describe the design and performance of an orthogonal time-of-flight (TOF) secondary ion mass spectrometer that can be retrofitted to existing focused ion beam (FIB) instruments. In particular, a simple interface has been developed for FIB/SEM instruments from the manufacturer Tescan. Orthogonal e...

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Main Authors: James A. Whitby, Fredrik Östlund, Peter Horvath, Mihai Gabureac, Jessica L. Riesterer, Ivo Utke, Markus Hohl, Libor Sedláček, Jaroslav Jiruše, Vinzenz Friedli, Mikhael Bechelany, Johann Michler
Format: Article
Language:English
Published: Wiley 2012-01-01
Series:Advances in Materials Science and Engineering
Online Access:http://dx.doi.org/10.1155/2012/180437
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