A Digital Twin Framework With Bayesian Optimization and Deep Learning for Semiconductor Process Control
This paper introduces an intelligent optimization framework that integrates Digital Twin (DT) technology, deep learning, and a tailored Multi-Restart Bayesian Optimization with Random Initialization (MRBORI) to enhance parameter control and yield in semiconductor manufacturing. The proposed framewor...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10926511/ |
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