APA (7th ed.) Citation

Solodukha, V. A., Pilipenko, U. A., Omelchenko, A. A., & Shestovski, D. V. Spectral Ellipsometry as a Method of Investigation of Influence of Rapid Thermal Processing of Silicon Wafers on their Optical Characteristics. Belarusian National Technical University.

Chicago Style (17th ed.) Citation

Solodukha, V. A., U. A. Pilipenko, A. A. Omelchenko, and D. V. Shestovski. Spectral Ellipsometry as a Method of Investigation of Influence of Rapid Thermal Processing of Silicon Wafers on Their Optical Characteristics. Belarusian National Technical University.

MLA (9th ed.) Citation

Solodukha, V. A., et al. Spectral Ellipsometry as a Method of Investigation of Influence of Rapid Thermal Processing of Silicon Wafers on Their Optical Characteristics. Belarusian National Technical University.