Design and Fabrication of Ultrathin Metallic Phase Shifters for Visible and Near-Infrared Wavelengths
The polarization state of light is critical for biological imaging, acousto-optics, bio-navigation, and many other optical applications. Phase shifters are extensively researched for their applications in optics. The size of optical elements with phase delay that are made from natural birefringent m...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-01-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/1/74 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1832587959360028672 |
|---|---|
| author | Qing Guo Jinkui Chu Chuanlong Guan Chuxiao Zhang Ran Zhang |
| author_facet | Qing Guo Jinkui Chu Chuanlong Guan Chuxiao Zhang Ran Zhang |
| author_sort | Qing Guo |
| collection | DOAJ |
| description | The polarization state of light is critical for biological imaging, acousto-optics, bio-navigation, and many other optical applications. Phase shifters are extensively researched for their applications in optics. The size of optical elements with phase delay that are made from natural birefringent materials is limited; however, fabricating waveplates from dielectric metamaterials is very complex and expensive. Here, we present an ultrathin (14 nm) metallic phase shifter developed using nanoimprinting technology and the oxygen plasma ashing technique for visible and near-infrared wavelengths. The fabrication process can produce desirable metallic phase shifters with high efficiency, large area, and low cost. We demonstrate through a numerical simulation and experiment that the metallic phase shifter exhibits phase delay performance. Our results highlight the simplicity of the fabrication process for a metallic phase shifter with phase delay performance and offer important opportunities for creating high-efficiency, ultrathin polarizing elements, which can be used in miniaturized devices, such as integrated circuits. |
| format | Article |
| id | doaj-art-e603f405f6314ba6ad9fc0faa5d42470 |
| institution | Kabale University |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-e603f405f6314ba6ad9fc0faa5d424702025-01-24T13:42:02ZengMDPI AGMicromachines2072-666X2025-01-011617410.3390/mi16010074Design and Fabrication of Ultrathin Metallic Phase Shifters for Visible and Near-Infrared WavelengthsQing Guo0Jinkui Chu1Chuanlong Guan2Chuxiao Zhang3Ran Zhang4State Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, ChinaState Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, ChinaState Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, ChinaState Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, ChinaState Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, ChinaThe polarization state of light is critical for biological imaging, acousto-optics, bio-navigation, and many other optical applications. Phase shifters are extensively researched for their applications in optics. The size of optical elements with phase delay that are made from natural birefringent materials is limited; however, fabricating waveplates from dielectric metamaterials is very complex and expensive. Here, we present an ultrathin (14 nm) metallic phase shifter developed using nanoimprinting technology and the oxygen plasma ashing technique for visible and near-infrared wavelengths. The fabrication process can produce desirable metallic phase shifters with high efficiency, large area, and low cost. We demonstrate through a numerical simulation and experiment that the metallic phase shifter exhibits phase delay performance. Our results highlight the simplicity of the fabrication process for a metallic phase shifter with phase delay performance and offer important opportunities for creating high-efficiency, ultrathin polarizing elements, which can be used in miniaturized devices, such as integrated circuits.https://www.mdpi.com/2072-666X/16/1/74nanoimprint lithographynanowire gratingsoxygen plasma ashing processtransmittance |
| spellingShingle | Qing Guo Jinkui Chu Chuanlong Guan Chuxiao Zhang Ran Zhang Design and Fabrication of Ultrathin Metallic Phase Shifters for Visible and Near-Infrared Wavelengths Micromachines nanoimprint lithography nanowire gratings oxygen plasma ashing process transmittance |
| title | Design and Fabrication of Ultrathin Metallic Phase Shifters for Visible and Near-Infrared Wavelengths |
| title_full | Design and Fabrication of Ultrathin Metallic Phase Shifters for Visible and Near-Infrared Wavelengths |
| title_fullStr | Design and Fabrication of Ultrathin Metallic Phase Shifters for Visible and Near-Infrared Wavelengths |
| title_full_unstemmed | Design and Fabrication of Ultrathin Metallic Phase Shifters for Visible and Near-Infrared Wavelengths |
| title_short | Design and Fabrication of Ultrathin Metallic Phase Shifters for Visible and Near-Infrared Wavelengths |
| title_sort | design and fabrication of ultrathin metallic phase shifters for visible and near infrared wavelengths |
| topic | nanoimprint lithography nanowire gratings oxygen plasma ashing process transmittance |
| url | https://www.mdpi.com/2072-666X/16/1/74 |
| work_keys_str_mv | AT qingguo designandfabricationofultrathinmetallicphaseshiftersforvisibleandnearinfraredwavelengths AT jinkuichu designandfabricationofultrathinmetallicphaseshiftersforvisibleandnearinfraredwavelengths AT chuanlongguan designandfabricationofultrathinmetallicphaseshiftersforvisibleandnearinfraredwavelengths AT chuxiaozhang designandfabricationofultrathinmetallicphaseshiftersforvisibleandnearinfraredwavelengths AT ranzhang designandfabricationofultrathinmetallicphaseshiftersforvisibleandnearinfraredwavelengths |