Investigation and Improvement of Inconsistency in Surface-Form Measurement Results Due to Difference of Incident Direction of Measuring Light in Abramson-Type Oblique-Incident Interferometer
An Abramson-type oblique-incident interferometer was used for the surface-form measurement of hand-scraped marks consisting of rough surfaces. Although the Abramson interferometer could measure the rough surface of hand-scraped marks under noncontact conditions, the inconsistency in the measurement...
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MDPI AG
2025-06-01
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| author | So Ito Takumi Yamagishi Kimihisa Matsumoto Kazuhide Kamiya |
| author_facet | So Ito Takumi Yamagishi Kimihisa Matsumoto Kazuhide Kamiya |
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| description | An Abramson-type oblique-incident interferometer was used for the surface-form measurement of hand-scraped marks consisting of rough surfaces. Although the Abramson interferometer could measure the rough surface of hand-scraped marks under noncontact conditions, the inconsistency in the measurement results was caused by the differences in the incident direction of the measuring light. This study investigated the inconsistency in the measurement results of the Abramson interferometer caused by the oblique incidence of the measuring light. The reproducibility of inconsistencies due to the difference in the incident direction of the measuring light was confirmed, and the relationship between the inconsistency of the measurement results and the incident angle of the measuring light was investigated. Consequently, it was confirmed that the inconsistency of the measurement results due to the difference in the incident direction of the measuring light could be reduced by decreasing the incident angle of the measuring light. To avoid the overcrowding of the interference fringes caused by the reduction in the incident angle of the measuring light, an oblique-incident interferometer with a near-infrared laser was constructed. The validity of the developed oblique-incident interferometer was evaluated by comparison with a commercially available contour measurement instrument. The surface form obtained by the developed oblique-incident interferometer was confirmed to be consistent with the envelope of the cross-sectional profile measured by the contour measurement instrument. |
| format | Article |
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| institution | Kabale University |
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| language | English |
| publishDate | 2025-06-01 |
| publisher | MDPI AG |
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| series | Metrology |
| spelling | doaj-art-e5b2c6a88bd947e29077f600b23e6ec12025-08-20T03:27:37ZengMDPI AGMetrology2673-82442025-06-01523410.3390/metrology5020034Investigation and Improvement of Inconsistency in Surface-Form Measurement Results Due to Difference of Incident Direction of Measuring Light in Abramson-Type Oblique-Incident InterferometerSo Ito0Takumi Yamagishi1Kimihisa Matsumoto2Kazuhide Kamiya3Department of Intelligent Robotics, Faculty of Information Engineering, Toyama Prefectural University, Toyama 939-0398, JapanDepartment of Intelligent Robotics, Faculty of Information Engineering, Toyama Prefectural University, Toyama 939-0398, JapanDepartment of Intelligent Robotics, Faculty of Information Engineering, Toyama Prefectural University, Toyama 939-0398, JapanDepartment of Intelligent Robotics, Faculty of Information Engineering, Toyama Prefectural University, Toyama 939-0398, JapanAn Abramson-type oblique-incident interferometer was used for the surface-form measurement of hand-scraped marks consisting of rough surfaces. Although the Abramson interferometer could measure the rough surface of hand-scraped marks under noncontact conditions, the inconsistency in the measurement results was caused by the differences in the incident direction of the measuring light. This study investigated the inconsistency in the measurement results of the Abramson interferometer caused by the oblique incidence of the measuring light. The reproducibility of inconsistencies due to the difference in the incident direction of the measuring light was confirmed, and the relationship between the inconsistency of the measurement results and the incident angle of the measuring light was investigated. Consequently, it was confirmed that the inconsistency of the measurement results due to the difference in the incident direction of the measuring light could be reduced by decreasing the incident angle of the measuring light. To avoid the overcrowding of the interference fringes caused by the reduction in the incident angle of the measuring light, an oblique-incident interferometer with a near-infrared laser was constructed. The validity of the developed oblique-incident interferometer was evaluated by comparison with a commercially available contour measurement instrument. The surface form obtained by the developed oblique-incident interferometer was confirmed to be consistent with the envelope of the cross-sectional profile measured by the contour measurement instrument.https://www.mdpi.com/2673-8244/5/2/34oblique-incident interferometerhand-scraped surfacenear-infrared lasersurface-form measurements |
| spellingShingle | So Ito Takumi Yamagishi Kimihisa Matsumoto Kazuhide Kamiya Investigation and Improvement of Inconsistency in Surface-Form Measurement Results Due to Difference of Incident Direction of Measuring Light in Abramson-Type Oblique-Incident Interferometer Metrology oblique-incident interferometer hand-scraped surface near-infrared laser surface-form measurements |
| title | Investigation and Improvement of Inconsistency in Surface-Form Measurement Results Due to Difference of Incident Direction of Measuring Light in Abramson-Type Oblique-Incident Interferometer |
| title_full | Investigation and Improvement of Inconsistency in Surface-Form Measurement Results Due to Difference of Incident Direction of Measuring Light in Abramson-Type Oblique-Incident Interferometer |
| title_fullStr | Investigation and Improvement of Inconsistency in Surface-Form Measurement Results Due to Difference of Incident Direction of Measuring Light in Abramson-Type Oblique-Incident Interferometer |
| title_full_unstemmed | Investigation and Improvement of Inconsistency in Surface-Form Measurement Results Due to Difference of Incident Direction of Measuring Light in Abramson-Type Oblique-Incident Interferometer |
| title_short | Investigation and Improvement of Inconsistency in Surface-Form Measurement Results Due to Difference of Incident Direction of Measuring Light in Abramson-Type Oblique-Incident Interferometer |
| title_sort | investigation and improvement of inconsistency in surface form measurement results due to difference of incident direction of measuring light in abramson type oblique incident interferometer |
| topic | oblique-incident interferometer hand-scraped surface near-infrared laser surface-form measurements |
| url | https://www.mdpi.com/2673-8244/5/2/34 |
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