Novel transparent high-entropy sesquioxide ceramics with high physicochemical plasma etching resistance

Novel transparent high-entropy sesquioxide ceramics with high physicochemical plasma etching resistance

High-entropy ceramics exhibit novel intrinsic properties. Hence, they have been explored for a wide range of applications ranging from thermal insulation and energy storage to advanced optical components. Recently, the semiconductor industry has faced a demand for higher-performance chips, necessita...

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Bibliographic Details
Main Authors:	Yu-Bin Shin, Su Been Ham, Ha-Neul Kim, Mi-Ju Kim, Jae-Woong Ko, Jae-Wook Lee, Young-Jo Park, Jung-Hyung Kim, Hyo-Chang Lee, Young Hwa Jung, Jung Woo Lee, Ho Jin Ma
Format:	Article
Language:	English
Published:	Tsinghua University Press 2025-01-01
Series:	Journal of Advanced Ceramics
Subjects:	high-entropy ceramics plasma etching resistance transparent ceramics sintering semiconductor manufacturing
Online Access:	https://www.sciopen.com/article/10.26599/JAC.2024.9221013
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