Influence of Order of Double Step Implantation of 64Zn+ and 16O+ Ions into Si on Formation of Zinc-containing Nanoparticles
This paper presents the research the formation of zinc-containing nanoparticles (NPs) in Si (001) after double-step hot implantation of 64Zn+ and 16O+ ions. High-resolution Transmission Electron Microscopy (HRTEM) and X-ray Diffraction (XRD) methods were used to study a crystal structure of the samp...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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Sumy State University
2015-12-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/4/articles/jnep_2015_V7_04028.pdf |
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| _version_ | 1849691562295951360 |
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| author | K.B. Eidelman K.D. Shcherbachev N.Yu. Tabachkova A.V. Goryachev D.M. Migunov D.A. Dronova |
| author_facet | K.B. Eidelman K.D. Shcherbachev N.Yu. Tabachkova A.V. Goryachev D.M. Migunov D.A. Dronova |
| author_sort | K.B. Eidelman |
| collection | DOAJ |
| description | This paper presents the research the formation of zinc-containing nanoparticles (NPs) in Si (001) after double-step hot implantation of 64Zn+ and 16O+ ions. High-resolution Transmission Electron Microscopy (HRTEM) and X-ray Diffraction (XRD) methods were used to study a crystal structure of the samples. Depth profiles of implanted impurity atoms were measured by Secondary Ion Mass Spectrometry (SIMS). Zn NPs with a size of 3 up to 50 nm were found in the implanted samples. Zinc-containing NPs with the size of 5-10 nm were found in the surface layer of as-implanted Si substrates. The effect of the order of implantation on structural defects and the impurity atoms depth profiles is established. |
| format | Article |
| id | doaj-art-e2031fafe93e4be3a2e32bd703e76fd2 |
| institution | DOAJ |
| issn | 2077-6772 |
| language | English |
| publishDate | 2015-12-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-e2031fafe93e4be3a2e32bd703e76fd22025-08-20T03:20:59ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722015-12-017404028-104028-3Influence of Order of Double Step Implantation of 64Zn+ and 16O+ Ions into Si on Formation of Zinc-containing NanoparticlesK.B. Eidelman0K.D. Shcherbachev1N.Yu. Tabachkova2A.V. Goryachev3D.M. Migunov4D.A. Dronova5National University of Science and Technology «MISiS»National University of Science and Technology «MISiS»National University of Science and Technology «MISiS»National Research University of Electronic Technology (MIET)National Research University of Electronic Technology (MIET)National Research University of Electronic Technology (MIET)This paper presents the research the formation of zinc-containing nanoparticles (NPs) in Si (001) after double-step hot implantation of 64Zn+ and 16O+ ions. High-resolution Transmission Electron Microscopy (HRTEM) and X-ray Diffraction (XRD) methods were used to study a crystal structure of the samples. Depth profiles of implanted impurity atoms were measured by Secondary Ion Mass Spectrometry (SIMS). Zn NPs with a size of 3 up to 50 nm were found in the implanted samples. Zinc-containing NPs with the size of 5-10 nm were found in the surface layer of as-implanted Si substrates. The effect of the order of implantation on structural defects and the impurity atoms depth profiles is established.http://jnep.sumdu.edu.ua/download/numbers/2015/4/articles/jnep_2015_V7_04028.pdfZn nanoparticlesDouble-step ion implantationPhase formatio |
| spellingShingle | K.B. Eidelman K.D. Shcherbachev N.Yu. Tabachkova A.V. Goryachev D.M. Migunov D.A. Dronova Influence of Order of Double Step Implantation of 64Zn+ and 16O+ Ions into Si on Formation of Zinc-containing Nanoparticles Журнал нано- та електронної фізики Zn nanoparticles Double-step ion implantation Phase formatio |
| title | Influence of Order of Double Step Implantation of 64Zn+ and 16O+ Ions into Si on Formation of Zinc-containing Nanoparticles |
| title_full | Influence of Order of Double Step Implantation of 64Zn+ and 16O+ Ions into Si on Formation of Zinc-containing Nanoparticles |
| title_fullStr | Influence of Order of Double Step Implantation of 64Zn+ and 16O+ Ions into Si on Formation of Zinc-containing Nanoparticles |
| title_full_unstemmed | Influence of Order of Double Step Implantation of 64Zn+ and 16O+ Ions into Si on Formation of Zinc-containing Nanoparticles |
| title_short | Influence of Order of Double Step Implantation of 64Zn+ and 16O+ Ions into Si on Formation of Zinc-containing Nanoparticles |
| title_sort | influence of order of double step implantation of 64zn and 16o ions into si on formation of zinc containing nanoparticles |
| topic | Zn nanoparticles Double-step ion implantation Phase formatio |
| url | http://jnep.sumdu.edu.ua/download/numbers/2015/4/articles/jnep_2015_V7_04028.pdf |
| work_keys_str_mv | AT kbeidelman influenceoforderofdoublestepimplantationof64znand16oionsintosionformationofzinccontainingnanoparticles AT kdshcherbachev influenceoforderofdoublestepimplantationof64znand16oionsintosionformationofzinccontainingnanoparticles AT nyutabachkova influenceoforderofdoublestepimplantationof64znand16oionsintosionformationofzinccontainingnanoparticles AT avgoryachev influenceoforderofdoublestepimplantationof64znand16oionsintosionformationofzinccontainingnanoparticles AT dmmigunov influenceoforderofdoublestepimplantationof64znand16oionsintosionformationofzinccontainingnanoparticles AT dadronova influenceoforderofdoublestepimplantationof64znand16oionsintosionformationofzinccontainingnanoparticles |