Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution
Tetramethyl ammonium hydroxide (TMAH) is an anisotropic etchant used in the wet etching process of the semiconductor industry and is hard to degrade by biotreatments when it exists in wastewater. This study evaluated the performance of a system combined with ultraviolet, magnetic catalyst (SiO2/Fe3O...
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| Format: | Article |
| Language: | English |
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Wiley
2013-01-01
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| Series: | International Journal of Photoenergy |
| Online Access: | http://dx.doi.org/10.1155/2013/191742 |
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| author | Chyow-San Chiou Kai-Jen Chuang Ya-Fen Lin Hua-Wei Chen Chih-Ming Ma |
| author_facet | Chyow-San Chiou Kai-Jen Chuang Ya-Fen Lin Hua-Wei Chen Chih-Ming Ma |
| author_sort | Chyow-San Chiou |
| collection | DOAJ |
| description | Tetramethyl ammonium hydroxide (TMAH) is an anisotropic etchant used in the wet etching process of the semiconductor industry and is hard to degrade by biotreatments when it exists in wastewater. This study evaluated the performance of a system combined with ultraviolet, magnetic catalyst (SiO2/Fe3O4) and O3, denoted as UV/O3, to TMAH in an aqueous solution. The mineralization efficiency of TMAH under various conditions follows the sequence: UV/O3 > UV/H2O2/O3 > H2O2/SiO2/Fe3O4/O3 > H2O2/O3 > SiO2/Fe3O4/O3 > O3 > UV/H2O2. The results suggest that UV/O3 process provides the best condition for the mineralization of TMAH (40 mg/L), resulting in 87.6% mineralization, at 60 min reaction time. Furthermore, the mineralization efficiency of SiO2/Fe3O4/H2O2/O3 was significantly higher than that of O3, H2O2/O3, and UV/H2O2. More than 90% of the magnetic catalyst was recovered and easily redispersed in a solution for reuse. |
| format | Article |
| id | doaj-art-e1ff8c2fa0ac45dba3fa392b21dc9632 |
| institution | OA Journals |
| issn | 1110-662X 1687-529X |
| language | English |
| publishDate | 2013-01-01 |
| publisher | Wiley |
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| series | International Journal of Photoenergy |
| spelling | doaj-art-e1ff8c2fa0ac45dba3fa392b21dc96322025-08-20T02:21:38ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2013-01-01201310.1155/2013/191742191742Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous SolutionChyow-San Chiou0Kai-Jen Chuang1Ya-Fen Lin2Hua-Wei Chen3Chih-Ming Ma4Department of Environmental Engineering, National Ilan University, Ilan 260, TaiwanDepartment of Public Health, School of Medicine, College of Medicine, Taipei Medical University, Taipei 110, TaiwanDepartment of Environmental Engineering, National Ilan University, Ilan 260, TaiwanDepartment of Cosmetic Application & Management, St. Mary’s Junior College of Medicine, Nursing and Management, Yilan 266, TaiwanDepartment of Cosmetic Application & Management, St. Mary’s Junior College of Medicine, Nursing and Management, Yilan 266, TaiwanTetramethyl ammonium hydroxide (TMAH) is an anisotropic etchant used in the wet etching process of the semiconductor industry and is hard to degrade by biotreatments when it exists in wastewater. This study evaluated the performance of a system combined with ultraviolet, magnetic catalyst (SiO2/Fe3O4) and O3, denoted as UV/O3, to TMAH in an aqueous solution. The mineralization efficiency of TMAH under various conditions follows the sequence: UV/O3 > UV/H2O2/O3 > H2O2/SiO2/Fe3O4/O3 > H2O2/O3 > SiO2/Fe3O4/O3 > O3 > UV/H2O2. The results suggest that UV/O3 process provides the best condition for the mineralization of TMAH (40 mg/L), resulting in 87.6% mineralization, at 60 min reaction time. Furthermore, the mineralization efficiency of SiO2/Fe3O4/H2O2/O3 was significantly higher than that of O3, H2O2/O3, and UV/H2O2. More than 90% of the magnetic catalyst was recovered and easily redispersed in a solution for reuse.http://dx.doi.org/10.1155/2013/191742 |
| spellingShingle | Chyow-San Chiou Kai-Jen Chuang Ya-Fen Lin Hua-Wei Chen Chih-Ming Ma Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution International Journal of Photoenergy |
| title | Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution |
| title_full | Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution |
| title_fullStr | Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution |
| title_full_unstemmed | Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution |
| title_short | Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution |
| title_sort | application of ozone related processes to mineralize tetramethyl ammonium hydroxide in aqueous solution |
| url | http://dx.doi.org/10.1155/2013/191742 |
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