Composition Determination from Strain Relaxation in 4D-STEM
Composition determination with high spatial resolution is crucial for device engineering of electronic and optoelectronic systems. While scanning transmission electron microscopy (STEM) can infer material composition from strain with high precision, multiple scattering effects (dynamic diffraction)...
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| Format: | Article |
| Language: | English |
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IOP Publishing
2025-01-01
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| Series: | Applied Physics Express |
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| Online Access: | https://doi.org/10.35848/1882-0786/ade41b |
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| author | F. Otto L. Niermann T. Niermann M. Lehmann |
| author_facet | F. Otto L. Niermann T. Niermann M. Lehmann |
| author_sort | F. Otto |
| collection | DOAJ |
| description | Composition determination with high spatial resolution is crucial for device engineering of electronic and optoelectronic systems. While scanning transmission electron microscopy (STEM) can infer material composition from strain with high precision, multiple scattering effects (dynamic diffraction) often hinder accurate evaluation. This challenge is amplified by the inevitable relaxation of strain at the surfaces of thin TEM lamellae, leading to variations in dynamic diffraction patterns. Here, we introduce a method that directly exploits these variations from surface relaxation to extract composition, lamella thickness, and width of a quantum well within a known substrate, all from a single 4D-STEM measurement. |
| format | Article |
| id | doaj-art-e1b5b747c8c24c95a841a9c2e85e2abd |
| institution | Kabale University |
| issn | 1882-0786 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | IOP Publishing |
| record_format | Article |
| series | Applied Physics Express |
| spelling | doaj-art-e1b5b747c8c24c95a841a9c2e85e2abd2025-08-20T03:26:34ZengIOP PublishingApplied Physics Express1882-07862025-01-0118606550210.35848/1882-0786/ade41bComposition Determination from Strain Relaxation in 4D-STEMF. Otto0L. Niermann1https://orcid.org/0009-0005-1584-8092T. Niermann2https://orcid.org/0009-0007-6251-8891M. Lehmann3Technische Universität Berlin , Institut für Physik und Astronomie, Strasse des 17. Juni 135, 10623 Berlin, GermanyTechnische Universität Berlin , Institut für Physik und Astronomie, Strasse des 17. Juni 135, 10623 Berlin, GermanyTechnische Universität Berlin , Institut für Physik und Astronomie, Strasse des 17. Juni 135, 10623 Berlin, GermanyTechnische Universität Berlin , Institut für Physik und Astronomie, Strasse des 17. Juni 135, 10623 Berlin, GermanyComposition determination with high spatial resolution is crucial for device engineering of electronic and optoelectronic systems. While scanning transmission electron microscopy (STEM) can infer material composition from strain with high precision, multiple scattering effects (dynamic diffraction) often hinder accurate evaluation. This challenge is amplified by the inevitable relaxation of strain at the surfaces of thin TEM lamellae, leading to variations in dynamic diffraction patterns. Here, we introduce a method that directly exploits these variations from surface relaxation to extract composition, lamella thickness, and width of a quantum well within a known substrate, all from a single 4D-STEM measurement.https://doi.org/10.35848/1882-0786/ade41bComposition Determination4D-STEMHeterointerfacesDynamic DiffractionStrainTransmission Electron Microscopy |
| spellingShingle | F. Otto L. Niermann T. Niermann M. Lehmann Composition Determination from Strain Relaxation in 4D-STEM Applied Physics Express Composition Determination 4D-STEM Heterointerfaces Dynamic Diffraction Strain Transmission Electron Microscopy |
| title | Composition Determination from Strain Relaxation in 4D-STEM |
| title_full | Composition Determination from Strain Relaxation in 4D-STEM |
| title_fullStr | Composition Determination from Strain Relaxation in 4D-STEM |
| title_full_unstemmed | Composition Determination from Strain Relaxation in 4D-STEM |
| title_short | Composition Determination from Strain Relaxation in 4D-STEM |
| title_sort | composition determination from strain relaxation in 4d stem |
| topic | Composition Determination 4D-STEM Heterointerfaces Dynamic Diffraction Strain Transmission Electron Microscopy |
| url | https://doi.org/10.35848/1882-0786/ade41b |
| work_keys_str_mv | AT fotto compositiondeterminationfromstrainrelaxationin4dstem AT lniermann compositiondeterminationfromstrainrelaxationin4dstem AT tniermann compositiondeterminationfromstrainrelaxationin4dstem AT mlehmann compositiondeterminationfromstrainrelaxationin4dstem |