Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by Boron
A type of tetrahedral amorphous carbon (ta-C) film that was doped by boron (ta-C:B) is focused on in this paper. The ta-C film is prepared by filtered cathodic vacuum arc (FCVA) technique and then doped with boron using the thermal diffusion method. Then the microcosmic structure and electrical cond...
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Wiley
2015-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2015/727285 |
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| author | Xiaoyan Wang Yuqing Zhao |
| author_facet | Xiaoyan Wang Yuqing Zhao |
| author_sort | Xiaoyan Wang |
| collection | DOAJ |
| description | A type of tetrahedral amorphous carbon (ta-C) film that was doped by boron (ta-C:B) is focused on in this paper. The ta-C film is prepared by filtered cathodic vacuum arc (FCVA) technique and then doped with boron using the thermal diffusion method. Then the microcosmic structure and electrical conductivity of the ta-C are characterized by an X-ray photoelectron spectroscopy (XPS) method and four-probe method, respectively. The results show that the conductivity of ta-C:B is significantly increased; the resistivity decreases from 1.5 × 106 Ω·cm to 350 Ω·cm approximately, while the percentage of sp3 bonds in the film is changed from 87% to 60% approximately. It means that this type of film preserved the mechanical characteristics of diamond-like carbon (DLC) films and improved the electrical characteristics greatly at the same time. |
| format | Article |
| id | doaj-art-e16c8a1ca5c34e56917c75e6a8bc03c9 |
| institution | DOAJ |
| issn | 1687-8434 1687-8442 |
| language | English |
| publishDate | 2015-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advances in Materials Science and Engineering |
| spelling | doaj-art-e16c8a1ca5c34e56917c75e6a8bc03c92025-08-20T03:21:06ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422015-01-01201510.1155/2015/727285727285Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by BoronXiaoyan Wang0Yuqing Zhao1Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi’an Jiaotong University, Xi’an 710049, ChinaKey Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi’an Jiaotong University, Xi’an 710049, ChinaA type of tetrahedral amorphous carbon (ta-C) film that was doped by boron (ta-C:B) is focused on in this paper. The ta-C film is prepared by filtered cathodic vacuum arc (FCVA) technique and then doped with boron using the thermal diffusion method. Then the microcosmic structure and electrical conductivity of the ta-C are characterized by an X-ray photoelectron spectroscopy (XPS) method and four-probe method, respectively. The results show that the conductivity of ta-C:B is significantly increased; the resistivity decreases from 1.5 × 106 Ω·cm to 350 Ω·cm approximately, while the percentage of sp3 bonds in the film is changed from 87% to 60% approximately. It means that this type of film preserved the mechanical characteristics of diamond-like carbon (DLC) films and improved the electrical characteristics greatly at the same time.http://dx.doi.org/10.1155/2015/727285 |
| spellingShingle | Xiaoyan Wang Yuqing Zhao Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by Boron Advances in Materials Science and Engineering |
| title | Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by Boron |
| title_full | Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by Boron |
| title_fullStr | Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by Boron |
| title_full_unstemmed | Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by Boron |
| title_short | Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by Boron |
| title_sort | study of electrical conductivity and microcosmic structure of tetrahedral amorphous carbon films doped by boron |
| url | http://dx.doi.org/10.1155/2015/727285 |
| work_keys_str_mv | AT xiaoyanwang studyofelectricalconductivityandmicrocosmicstructureoftetrahedralamorphouscarbonfilmsdopedbyboron AT yuqingzhao studyofelectricalconductivityandmicrocosmicstructureoftetrahedralamorphouscarbonfilmsdopedbyboron |