Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by Boron
A type of tetrahedral amorphous carbon (ta-C) film that was doped by boron (ta-C:B) is focused on in this paper. The ta-C film is prepared by filtered cathodic vacuum arc (FCVA) technique and then doped with boron using the thermal diffusion method. Then the microcosmic structure and electrical cond...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2015-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2015/727285 |
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| Summary: | A type of tetrahedral amorphous carbon (ta-C) film that was doped by boron (ta-C:B) is focused on in this paper. The ta-C film is prepared by filtered cathodic vacuum arc (FCVA) technique and then doped with boron using the thermal diffusion method. Then the microcosmic structure and electrical conductivity of the ta-C are characterized by an X-ray photoelectron spectroscopy (XPS) method and four-probe method, respectively. The results show that the conductivity of ta-C:B is significantly increased; the resistivity decreases from 1.5 × 106 Ω·cm to 350 Ω·cm approximately, while the percentage of sp3 bonds in the film is changed from 87% to 60% approximately. It means that this type of film preserved the mechanical characteristics of diamond-like carbon (DLC) films and improved the electrical characteristics greatly at the same time. |
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| ISSN: | 1687-8434 1687-8442 |