Microengineered Flexible Pressure Sensors with Sacrificial Molding Layer: A Novel Fabrication Approach for Improved Performance
Recent research aims to improve the performance of flexible pressure sensors by microengineering their active layer. However, current fabrication approaches often require a trade-off between scalability, miniaturization, and performance. To overcome these limitations, we propose a novel technique th...
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| Format: | Article |
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MDPI AG
2024-03-01
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| Series: | Proceedings |
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| Online Access: | https://www.mdpi.com/2504-3900/97/1/105 |
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| author | Maria Brites Atalaia Rosa Michael Kraft |
| author_facet | Maria Brites Atalaia Rosa Michael Kraft |
| author_sort | Maria Brites Atalaia Rosa |
| collection | DOAJ |
| description | Recent research aims to improve the performance of flexible pressure sensors by microengineering their active layer. However, current fabrication approaches often require a trade-off between scalability, miniaturization, and performance. To overcome these limitations, we propose a novel technique that involves stacking all sensor layers on a carrier wafer and shaping the active layer into micro-cones using a sacrificial mold. Precise miniaturization through photolithography techniques improves mapping resolution, useful for object recognition applications. This method offers enhanced ease of fabrication, versatility in shape and size, and tunability, potentially improving the efficacy of flexible pressure sensors for various applications. |
| format | Article |
| id | doaj-art-e0c48d7e7b2e4fa6bb22e9876dfea7e5 |
| institution | DOAJ |
| issn | 2504-3900 |
| language | English |
| publishDate | 2024-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj-art-e0c48d7e7b2e4fa6bb22e9876dfea7e52025-08-20T02:43:39ZengMDPI AGProceedings2504-39002024-03-0197110510.3390/proceedings2024097105Microengineered Flexible Pressure Sensors with Sacrificial Molding Layer: A Novel Fabrication Approach for Improved PerformanceMaria Brites Atalaia Rosa0Michael Kraft1Micro and Nanosystems (MNS), Department of Electrical Engineering (ESAT), University of Leuven, 3001 Leuven, BelgiumMicro and Nanosystems (MNS), Department of Electrical Engineering (ESAT), University of Leuven, 3001 Leuven, BelgiumRecent research aims to improve the performance of flexible pressure sensors by microengineering their active layer. However, current fabrication approaches often require a trade-off between scalability, miniaturization, and performance. To overcome these limitations, we propose a novel technique that involves stacking all sensor layers on a carrier wafer and shaping the active layer into micro-cones using a sacrificial mold. Precise miniaturization through photolithography techniques improves mapping resolution, useful for object recognition applications. This method offers enhanced ease of fabrication, versatility in shape and size, and tunability, potentially improving the efficacy of flexible pressure sensors for various applications.https://www.mdpi.com/2504-3900/97/1/105flexible pressure sensorsmicroengineeringsacrificial molding layercapacitive sensingconical microstructuresPDMS |
| spellingShingle | Maria Brites Atalaia Rosa Michael Kraft Microengineered Flexible Pressure Sensors with Sacrificial Molding Layer: A Novel Fabrication Approach for Improved Performance Proceedings flexible pressure sensors microengineering sacrificial molding layer capacitive sensing conical microstructures PDMS |
| title | Microengineered Flexible Pressure Sensors with Sacrificial Molding Layer: A Novel Fabrication Approach for Improved Performance |
| title_full | Microengineered Flexible Pressure Sensors with Sacrificial Molding Layer: A Novel Fabrication Approach for Improved Performance |
| title_fullStr | Microengineered Flexible Pressure Sensors with Sacrificial Molding Layer: A Novel Fabrication Approach for Improved Performance |
| title_full_unstemmed | Microengineered Flexible Pressure Sensors with Sacrificial Molding Layer: A Novel Fabrication Approach for Improved Performance |
| title_short | Microengineered Flexible Pressure Sensors with Sacrificial Molding Layer: A Novel Fabrication Approach for Improved Performance |
| title_sort | microengineered flexible pressure sensors with sacrificial molding layer a novel fabrication approach for improved performance |
| topic | flexible pressure sensors microengineering sacrificial molding layer capacitive sensing conical microstructures PDMS |
| url | https://www.mdpi.com/2504-3900/97/1/105 |
| work_keys_str_mv | AT mariabritesatalaiarosa microengineeredflexiblepressuresensorswithsacrificialmoldinglayeranovelfabricationapproachforimprovedperformance AT michaelkraft microengineeredflexiblepressuresensorswithsacrificialmoldinglayeranovelfabricationapproachforimprovedperformance |