Calculation strength of torsion bar suspension of micromirrors (MEOMS)
The paper considers the strength calculation of the torsion bar suspension of a micromirror with a reflective layer of high optical quality of the surface for deflecting the reflected laser beam. By changing the angle of inclination of the micromirror, the laser beam enters the various input ch...
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| Format: | Article |
| Language: | English |
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Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2021-06-01
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| Series: | Омский научный вестник |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%E2%84%96%203%20(177)%20(%D0%9E%D0%9D%D0%92)/5-12%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%98.,%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%94..pdf |
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| _version_ | 1832572774782074880 |
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| author | D. I. Chernyavsky D. D. Chernyavsky |
| author_facet | D. I. Chernyavsky D. D. Chernyavsky |
| author_sort | D. I. Chernyavsky |
| collection | DOAJ |
| description | The paper considers the strength calculation of the torsion
bar suspension of a micromirror with a reflective layer
of high optical quality of the surface for deflecting the
reflected laser beam. By changing the angle of inclination
of the micromirror, the laser beam enters the various input
channels of the optical sensor. In this case, a control signal
is generated for the further operation of the microcircuit.
Thus, the micromirror performs the function of a switch for
input optical channels connecting certain input or output
elements of the microcircuit in various combinations for
further processing.
In this work, the calculation of the strength parameters of
the mechanical structure of a micromirror made of various
materials has been carried out. Practical recommendations
related to the development of micromirror torsion bar
suspension are given. |
| format | Article |
| id | doaj-art-df1f81baca694099930ce991aa143727 |
| institution | Kabale University |
| issn | 1813-8225 2541-7541 |
| language | English |
| publishDate | 2021-06-01 |
| publisher | Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education |
| record_format | Article |
| series | Омский научный вестник |
| spelling | doaj-art-df1f81baca694099930ce991aa1437272025-02-02T07:58:09ZengOmsk State Technical University, Federal State Autonoumos Educational Institution of Higher EducationОмский научный вестник1813-82252541-75412021-06-013 (177)51210.25206/1813-8225-2021-177-5-12Calculation strength of torsion bar suspension of micromirrors (MEOMS)D. I. Chernyavsky0https://orcid.org/0000-0002-7585-433XD. D. Chernyavsky1Omsk State Technical UniversityOmsk State Technical UniversityThe paper considers the strength calculation of the torsion bar suspension of a micromirror with a reflective layer of high optical quality of the surface for deflecting the reflected laser beam. By changing the angle of inclination of the micromirror, the laser beam enters the various input channels of the optical sensor. In this case, a control signal is generated for the further operation of the microcircuit. Thus, the micromirror performs the function of a switch for input optical channels connecting certain input or output elements of the microcircuit in various combinations for further processing. In this work, the calculation of the strength parameters of the mechanical structure of a micromirror made of various materials has been carried out. Practical recommendations related to the development of micromirror torsion bar suspension are given.https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%E2%84%96%203%20(177)%20(%D0%9E%D0%9D%D0%92)/5-12%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%98.,%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%94..pdfmicrotechnologymicroelectromechanical systems (mems)microoptoelectromechanical devices (moems)similarity theorytorsion strength calculationelectrostatic micromirror drivekinematicsmechanical strength |
| spellingShingle | D. I. Chernyavsky D. D. Chernyavsky Calculation strength of torsion bar suspension of micromirrors (MEOMS) Омский научный вестник microtechnology microelectromechanical systems (mems) microoptoelectromechanical devices (moems) similarity theory torsion strength calculation electrostatic micromirror drive kinematics mechanical strength |
| title | Calculation strength of torsion bar suspension of micromirrors (MEOMS) |
| title_full | Calculation strength of torsion bar suspension of micromirrors (MEOMS) |
| title_fullStr | Calculation strength of torsion bar suspension of micromirrors (MEOMS) |
| title_full_unstemmed | Calculation strength of torsion bar suspension of micromirrors (MEOMS) |
| title_short | Calculation strength of torsion bar suspension of micromirrors (MEOMS) |
| title_sort | calculation strength of torsion bar suspension of micromirrors meoms |
| topic | microtechnology microelectromechanical systems (mems) microoptoelectromechanical devices (moems) similarity theory torsion strength calculation electrostatic micromirror drive kinematics mechanical strength |
| url | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%E2%84%96%203%20(177)%20(%D0%9E%D0%9D%D0%92)/5-12%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%98.,%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%94..pdf |
| work_keys_str_mv | AT dichernyavsky calculationstrengthoftorsionbarsuspensionofmicromirrorsmeoms AT ddchernyavsky calculationstrengthoftorsionbarsuspensionofmicromirrorsmeoms |